CDL-SiC
© Dr. Georg Pfusterschmied
SiC Technology
Dr. Georg Pfusterschmied
Georg Pfusterschmied studied Materials Science at TU Wien (Austria), with a focus on functional materials as well as micro- and nanotechnology. A significant part of his master’s research was conducted at the University of Toronto (Canada), where he worked on microfabricated piezoelectric thin-film actuators and sensors. During his doctoral studies at TU Wien, he focused on the design, fabrication, and characterization of microtechnologically manufactured liquid sensors. He spent several months as a visiting researcher at the University of Melbourne (Australia) in the group of Prof. John Sader, where he investigated theoretical models of microfluidic interactions and their application to liquid sensing systems. His dissertation was recognized with the prestigious Dr. Ernst Fehrer Award, opens an external URL in a new window.
After completing his PhD, he continued his research at the Institute of Sensor and Actuator Systems at TU Wien, where he independently acquired and led numerous third-party funded projects, including grants from the European Union, the Austrian Research Promotion Agency (FFG), the Christian Doppler Research Association (CDG), and direct industrial collaborations. Since January 1, 2023, he has been the scientific director of the Christian Doppler Laboratory for Sustainable Silicon Carbide Technology, which focuses on the resource-efficient use of silicon carbide (SiC).
Since January 1, 2025, Georg Pfusterschmied has held a Tenure Track Position as part of TU Wien’s Excellence in Research Career Program. His current research centers on thin-film technologies, micro- and nanostructuring, and the materials science of silicon carbide for applications in microsystems technology and power electronics. A particular emphasis is placed on the transfer of fundamental materials research into technology-oriented applications.
He is the author and co-author of numerous peer-reviewed scientific publications, opens an external URL in a new window, presents regularly at international conferences, supervises master’s and doctoral theses, serves as a reviewer for scientific journals, and is actively involved in academic self-governance.
Currently running research projects
Completed research projects
Publications
2024
- | Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material at reposiTUm , opens an external URL in a new windowBerger, C., Schiek, M., Pandit, S., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material. Journal of Applied Physics, 136(14), 1–11. https://doi.org/10.1063/5.0226103
- | Functionalization of three-dimensional epitaxial graphene with metal nanoparticles at reposiTUm , opens an external URL in a new windowPompei, E., Vlamidis, Y., Ferbel, L., Zannier, V., Rubini, S., Esteban, D. A., Bals, S., Marinelli, C., Pfusterschmied, G., Leitgeb, M., Schmid, U., Heun, S., & Veronesi, S. (2024). Functionalization of three-dimensional epitaxial graphene with metal nanoparticles. Nanoscale, 16(34), 16107–16118. https://doi.org/10.1039/d4nr01986e
- | K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation at reposiTUm , opens an external URL in a new windowYang, T., Perazzi, M., Leitgeb, M., Zellner, C., Pfusterschmied, G., & Schmid, U. (2024, September). K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation. ICSCRM 2024: International Conference on Silicon Carbide and Related Materials, Raleigh, United States of America (the).
- | A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer at reposiTUm , opens an external URL in a new windowWahid, S. N., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024). A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer. Materials Science Forum, 1124, 35–41. https://doi.org/10.4028/p-8AEonP
- | Modeling polycrystalline diamond MEMS resonators at reposiTUm , opens an external URL in a new windowGesing, A. L., Huber, D., Steinmüller-Neth, D., Pfusterschmied, G., Platz, D., & Schmid, U. (2024). Modeling polycrystalline diamond MEMS resonators. In 19th International Workshop on Nanomechanical Sensing (pp. 114–114).
- | Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators at reposiTUm , opens an external URL in a new windowHuber, D., Platz, D., Loch Gesing, A., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024, June). Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators. MESS24 - Microelectronic Systems Symposium, Wien, Austria.
- | A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling at reposiTUm , opens an external URL in a new windowWahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024, June). A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling. MESS24 - Microelectronic Systems Symposium, Wien, Austria.
- | On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics at reposiTUm , opens an external URL in a new windowErmilova, E., Klapetek, P., Pfusterschmied, G., Nanjappan, C., Schmid, U., & Hertwig, A. (2024, May 29). On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics. EMRS Spring Meeting 2024 - ALTECH 2024, Strasbourg, France.
- | Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition at reposiTUm , opens an external URL in a new windowMoll, P., Schwarz, S., Pfusterschmied, G., Artner, W., & Schmid, U. (2024). Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition. Journal of Microelectromechanical Systems, 1–9. https://doi.org/10.34726/7319
- | Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators at reposiTUm , opens an external URL in a new windowBerger, C., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators. Journal of Applied Physics, 135(16), 1–10. https://doi.org/10.1063/5.0197261
- | Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si at reposiTUm , opens an external URL in a new windowMoll, P., Pfusterschmied, G., Schwarz, S., Stöger-Pollach, M., & Schmid, U. (2024). Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si. SENSORS AND ACTUATORS A-PHYSICAL, 372, 1–9. https://doi.org/10.1016/j.sna.2024.115376
- | Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators at reposiTUm , opens an external URL in a new windowHuber, D., Platz, D., Gesing, A. L., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024). Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators. In Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 915–918). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439421
- | Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply Deposition at reposiTUm , opens an external URL in a new windowMoll, P., Pfusterschmied, G., & Schmid, U. (2024). Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply Deposition. In IEEE Xplore (Ed.), Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 606–609). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439413
- | High-temperature adhesive bonding of 4H-SiC substrates at reposiTUm , opens an external URL in a new windowParmar, P. M., Leitgeb, M., Yadav, M. K., Zellner, C., Wedl, G., Pfusterschmied, G., & Schmid, U. (2024). High-temperature adhesive bonding of 4H-SiC substrates. ICSCRM 2024: INTERNATIONAL CONFERENCE ON SILICON CARBIDE AND RELATED MATERIALS 2024, Raleigh, United States of America (the).
- | High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin Foils at reposiTUm , opens an external URL in a new windowPerazzi, M., Leitgeb, M., Vengattoor Raghu, A., Zellner, C., Hahn, R., Kirnbauer, A., Schwarz, S., Pfusterschmied, G., & Schmid, U. (2024). High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin Foils. Materials Science Forum, 1124, 43–49. https://doi.org/10.4028/p-D0xoyc
2023
- | Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications at reposiTUm , opens an external URL in a new windowVeronesi, S., Vlamidis, Y., Ferbel, L., Marinelli, C., Sanmartin, C., Taglieri, I., Pfusterschmied, G., Leitgeb, M., Schmid, U., Mencarelli, F., & Heun, S. (2023). Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications. Journal of the Science of Food and Agriculture, 1–11. https://doi.org/10.1002/jsfa.13118
- | A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer at reposiTUm , opens an external URL in a new windowWahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2023, September 21). A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer. ICSCRM 2023 . International Conference on Silicon Carbide and Related Materials, Sorrento, Italy.
- | Hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications at reposiTUm , opens an external URL in a new windowVeronesi, S., Aureliano, A. M., Vlamidis, Y., POMPEI, E., Pfusterschmied, G., Leitgeb, M., Schmid, U., & Heun, S. (2023, September 4). Hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications. CMD30 FisMat 2023, Milan, Italy.
- | High-temperature Reorganization Behavior of Porous 4H-SiC Thin Foils at reposiTUm , opens an external URL in a new windowPerazzi, M., Leitgeb, M., Pfusterschmied, G., Vengattoor Raghu, A., Schmid, U., Zellner, C., Schwarz, S., Hahn, R., & Kirnbauer, A. (2023, September). High-temperature Reorganization Behavior of Porous 4H-SiC Thin Foils. ICSCRM2023 - International Conference on Silicon Carbide and Related Materials, Sorrento, Italy.
- | Electrical Characterization of the SiO₂/4H-SiC Interface at reposiTUm , opens an external URL in a new windowNanjappan, C., Pfusterschmied, G., & Schmid, U. (2023). Electrical Characterization of the SiO₂/4H-SiC Interface. In Sensor and Measurement Science International (SMSI 2023) (pp. 235–236). https://doi.org/10.5162/SMSI2023/D5.3
- | The gas-liquid-Q-factor-inversion in MEMS plate resonators at reposiTUm , opens an external URL in a new windowGesing, A., Tran, T., Huber, D., Steinmüller-Nethl, D., Pfusterschmied, G., Schneider, M., Platz, D., & Schmid, U. (2023). The gas-liquid-Q-factor-inversion in MEMS plate resonators. Journal of Sound and Vibration, 559, Article 117777. https://doi.org/10.1016/j.jsv.2023.117777
- | Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications at reposiTUm , opens an external URL in a new windowMacili, A., Vlamidis, Y., Pfusterschmied, G., Leitgeb, M., Schmid, U., Heun, S., & Veronesi, S. (2023). Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications. Applied Surface Science, 615, Article 156375. https://doi.org/10.1016/j.apsusc.2023.156375
- | Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS at reposiTUm , opens an external URL in a new windowMoll, P., Pfusterschmied, G., & Schmid, U. (2023). Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 590–593). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052144
2022
- | Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids at reposiTUm , opens an external URL in a new windowMoll, P., Pfusterschmied, G., Schneider, M., Dorfmeister, M., Knafl, S., Wanzenböck, H., & Schmid, U. (2022). Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids. Journal of Microelectromechanical Systems, 31(3), 372–383. https://doi.org/10.1109/JMEMS.2022.3163477
- | 3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC at reposiTUm , opens an external URL in a new windowVeronesi, S., Pfusterschmied, G., Fabbri, F., Leitgeb, M., Arif, O., Esteban, D. A., Bals, S., Schmid, U., & Heun, S. (2022). 3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC. Carbon, 189, 210–218. https://doi.org/10.1016/j.carbon.2021.12.042
- | Functional Silicon Oxide Nanolayers for Temperature Sensing on 4H-SiC at reposiTUm , opens an external URL in a new windowFleckl, G., Pfusterschmied, G., & Schmid, U. (2022). Functional Silicon Oxide Nanolayers for Temperature Sensing on 4H-SiC. 2022 MRS Fall Meeting, Boston, United States of America (the).
- | SiC Process Technologies for MEMS at reposiTUm , opens an external URL in a new windowSchmid, U., Schneider, M., Leitgeb, M., & Pfusterschmied, G. (2022). SiC Process Technologies for MEMS. MNE 2022 - Eurosensors, Leuven, Belgium.
2021
- | Communication-Current Oscillations in Photoelectrochemical Etching of Monocrystalline 4H Silicon Carbide at reposiTUm , opens an external URL in a new windowLeitgeb, M., Pfusterschmied, G., Schwarz, S., Depuydt, B., Cho, J., & Schmid, U. (2021). Communication-Current Oscillations in Photoelectrochemical Etching of Monocrystalline 4H Silicon Carbide. ECS Journal of Solid State Science and Technology, 10(7), 073003. https://doi.org/10.1149/2162-8777/ac10b3
- | Piezoelectric Switching of Bistable MEMS Membranes in Fluids at reposiTUm , opens an external URL in a new windowMoll, P., Pfusterschmied, G., Schneide, M., Dorfmeister, M., & Schmid, U. (2021). Piezoelectric Switching of Bistable MEMS Membranes in Fluids. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), online, Unknown. IEEE. https://doi.org/10.1109/mems51782.2021.9375163
- | Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Triendl, F., Schneider, M., & Schmid, U. (2021). Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights. Materials Science in Semiconductor Processing, 123(105504), 105504. https://doi.org/10.1016/j.mssp.2020.105504
- | Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layer at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Berger, C., Schwarz, S., Artner, W., & Schmid, U. (2021). Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layer. Thin Solid Films, 721(138539), 138539. https://doi.org/10.1016/j.tsf.2021.138539
- | Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiC at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Pobegen, G., Schwarz, S., Artner, W., Konrath, J. P., & Schmid, U. (2021). Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiC. Materials Science in Semiconductor Processing, 131(105888), 105888. https://doi.org/10.1016/j.mssp.2021.105888
- | Si/4H-SiC heterostructure formation using metal-induced crystallization at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Schwarz, S., Artner, W., & Schmid, U. (2021). Si/4H-SiC heterostructure formation using metal-induced crystallization. Materials Science in Semiconductor Processing, 128(105763), 105763. https://doi.org/10.1016/j.mssp.2021.105763
- | Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Schwarz, S., Pobegen, G., Konrath, J. P., & Schmid, U. (2021). Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes. Semiconductor Science and Technology, 36(5), 055021. https://doi.org/10.1088/1361-6641/abf29b
2020
- | Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Weinmann, C., Schneider, M., Platz, D., Shen, N., Sader, J., & Schmid, U. (2020). Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids. Journal of Micromechanics and Microengineering, 30(7), 075004. https://doi.org/10.1088/1361-6439/ab8bc9
- | High Performance Piezoelectric MEMS Resonators in Fluids at reposiTUm , opens an external URL in a new windowSchmid, U., Hafner, J., Pfusterschmied, G., Platz, D., & Schneider, M. (2020). High Performance Piezoelectric MEMS Resonators in Fluids. XXII. Linz Winter Workshop 2020, Linz, Austria.
- | High performance piezoelectric AlN MEMS resonators for precise sensing in liquids at reposiTUm , opens an external URL in a new windowSchneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). High performance piezoelectric AlN MEMS resonators for precise sensing in liquids. Elektrotechnik Und Informationstechnik, 137(3), 121–127. https://doi.org/10.1007/s00502-020-00794-w
- | MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren at reposiTUm , opens an external URL in a new windowSchneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren. GIT, 64. JAHRGANG(4–5), 36–38.
- | On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Fleckl, G., Schwarz, S., & Schmid, U. (2020). On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC. Thin Solid Films, 697(137837), 137837. https://doi.org/10.1016/j.tsf.2020.137837
- | Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Pobegen, G., Konrath, J. P., & Schmid, U. (2020). Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes. Semiconductor Science and Technology, 35(11), 115011. https://doi.org/10.1088/1361-6641/abae8d
- | Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization at reposiTUm , opens an external URL in a new windowTriendl, F., Pfusterschmied, G., Zellner, C., Artner, W., Hradil, K., & Schmid, U. (2020). Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization. Materials Letters: X, 6, Article 100040. https://doi.org/10.1016/j.mlblux.2020.100040
2019
- | Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers at reposiTUm , opens an external URL in a new windowDorfmeister, M., Kössl, B., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/1361-6439/ab3185
- | Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Patocka, F., Weinmann, C., Schneider, M., Platz, D., & Schmid, U. (2019). Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids. Sensors and Actuators A: Physical, 295, 84–92. https://doi.org/10.1016/j.sna.2019.05.031
- | Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Weinmann, C., Hospodka, M., Hofko, B., Schneider, M., & Schmid, U. (2019). Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea (the Republic of). IEEE. https://doi.org/10.1109/memsys.2019.8870897
- | Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Weinmann, C., Schneider, M., Hospodka, M., Mirwald, J., Hofko, B., & Schmid, U. (2019). Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2019 - Proceedings (pp. 320–323). VDE Verlag GMBH.
- | Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range at reposiTUm , opens an external URL in a new windowTriendl, F., Fleckl, G., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range. Journal of Vacuum Science & Technology B, 37(3), 032903. https://doi.org/10.1116/1.5094137
2018
- | Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications at reposiTUm , opens an external URL in a new windowGillinger, M., Knobloch, T., Markovic, A., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications. Materials Science in Semiconductor Processing, 81, 1–6. https://doi.org/10.1016/j.mssp.2018.02.028
- | Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback at reposiTUm , opens an external URL in a new windowFischeneder, M., Kucera, M., Hofbauer, F., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback. Sensors and Actuators B: Chemical, 260, 198–203. https://doi.org/10.1016/j.snb.2018.01.001
- | Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators at reposiTUm , opens an external URL in a new windowPlatz, D., Pfusterschmied, G., & Schmid, U. (2018). Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130896
- | Theoretical Framework for modelling the fluid-structure interaction of complex MEMS/NEMS resonator eigenmodes at reposiTUm , opens an external URL in a new windowPlatz, D., Pfusterschmied, G., & Schmid, U. (2018). Theoretical Framework for modelling the fluid-structure interaction of complex MEMS/NEMS resonator eigenmodes. In Proceedings of the Euromech Colloquium 603 (pp. 38–40). Universidade do Porto, Reitoria.
- | Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids at reposiTUm , opens an external URL in a new windowToledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2018). Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids. Microsystem Technologies, 24(3), 1423–1431. https://doi.org/10.1007/s00542-017-3536-0
- | Flow-through sensor based on piezoelectric MEMS resonator for thein-line monitoring of wine fermentation at reposiTUm , opens an external URL in a new windowToledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2018). Flow-through sensor based on piezoelectric MEMS resonator for thein-line monitoring of wine fermentation. Sensors and Actuators B: Chemical, 254, 291–298. https://doi.org/10.1016/j.snb.2017.07.096
2017
- | Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Steindl, W., Bittner, A., Schneider, M., & Schmid, U. (2017). Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 183–186). VDE Verlag GMBH.
- | Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Weinmann, C., Schneider, M., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2017). Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties. In IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017 (pp. 1013–1016). IEEE.
- | Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Toledo, J., Kucera, M., Steindl, W., Zemann, S., Ruiz-Díez, V., Schneider, M., Bittner, A., Sanchez-Rojas, J., & Schmid, U. (2017). Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. Micromachines, 8(7), 200. https://doi.org/10.3390/mi8070200
- | Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators at reposiTUm , opens an external URL in a new windowRuiz-Díez, V., Toledo, J., Hernando-Garcia, J., Pfusterschmied, G., & Schmid, U. (2017). Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 9). SPIE.
- | Piezoelectric MEMS: Material Aspects and Devices at reposiTUm , opens an external URL in a new windowSchneider, M., Mayrhofer, P., Gillinger, M., Pfusterschmied, G., & Schmid, U. (2017). Piezoelectric MEMS: Material Aspects and Devices. AMA Conferences 2017 - SENSOR 2017 and IRS2 201, Nürnberg, Germany.
- | Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators at reposiTUm , opens an external URL in a new windowToledo, J., Ruiz-Díez, V., Pfusterschmied, G., & Schmid, U. (2017). Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 11). SPIE.
- | Wine Fermentation Sensor Based on Piezoelectric Resonators at reposiTUm , opens an external URL in a new windowToledo, J., Ruiz-Díez, V., Sànchez-Rojas, J. L., Pfusterschmied, G., Schneider, M., & Schmid, U. (2017). Wine Fermentation Sensor Based on Piezoelectric Resonators. In IEEE Sensors 2017 - Proceedings (pp. 1–3). IEEE.
2016
- | Roof tile-shaped modes in quasi free-free supported piezoelectric microplate resonators in high viscous fluids at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Steindl, W., Manzaneque, T., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Roof tile-shaped modes in quasi free-free supported piezoelectric microplate resonators in high viscous fluids. Sensors and Actuators B: Chemical, 237, 999–1006. https://doi.org/10.1016/j.snb.2016.02.029
- | Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Toledo, J., Steindl, W., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators. In Proceedings of the 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016) (p. 2). IEEE.
- | Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media at reposiTUm , opens an external URL in a new windowRuiz-Díez, V., Hernando-García, J., Toledo, J., Manzaneque, T., Kucera, M., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2016). Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media. Journal of Micromechanics and Microengineering, 26(8), 084008. https://doi.org/10.1088/0960-1317/26/8/084008
- | Comparison of in‑plane and out‑of‑plane piezoelectric microresonators for real‑time monitoring of engine oil contamination with diesel at reposiTUm , opens an external URL in a new windowToledo, J., Manzaneque, T., Ruiz-Díez, V., Jimenez-Molinos, F., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2016). Comparison of in‑plane and out‑of‑plane piezoelectric microresonators for real‑time monitoring of engine oil contamination with diesel. Microsystem Technologies, 22, 1781–1790.
- | Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids at reposiTUm , opens an external URL in a new windowToledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sánchez-Rojas, J. L. (2016). Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids. Journal of Micromechanics and Microengineering, 26(8), 084012. https://doi.org/10.1088/0960-1317/26/8/084012
2015
- | Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes at reposiTUm , opens an external URL in a new windowKucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sànchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 107, 0535061–0535065. https://doi.org/10.1063/1.4928429
- | Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminiumnitride- actuated self-sensing micro-resonators in liquid media at reposiTUm , opens an external URL in a new windowKucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sánchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminiumnitride- actuated self-sensing micro-resonators in liquid media. Applied Physics Letters, 107(5), 053506. https://doi.org/10.1063/1.4928429
- | Multi Roof Tile-Shaped Vibration Modes In Mems Cantilever Sensors For Liquid Monitoring Purposes at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2015). Multi Roof Tile-Shaped Vibration Modes In Mems Cantilever Sensors For Liquid Monitoring Purposes. In MEMS 2015 (pp. 718–721). IEEE.
- | Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Wistrela, E., Manzaneque, T., Ruiz-Díez, V., Sánchez-Rojas, J. L., Bittner, A., & Schmid, U. (2015). Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids. Journal of Micromechanics and Microengineering, 25(10), 105014. https://doi.org/10.1088/0960-1317/25/10/105014
- | Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions at reposiTUm , opens an external URL in a new windowPfusterschmied, G., Kucera, M., Wistrela, E., Steindl, W., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2015). Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 969–972). IEEE.
- | Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·s at reposiTUm , opens an external URL in a new windowToledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2015). Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·s. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien, EU.
- | Out-of-plane Piezoelectric Microresonator and Oscillator Circuit for Monitoring Engine Oil Contamination with Diesel at reposiTUm , opens an external URL in a new windowToledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2015). Out-of-plane Piezoelectric Microresonator and Oscillator Circuit for Monitoring Engine Oil Contamination with Diesel. In Proc. of SPIE Vol. 9517-9520 (p. 9). SPIE.
- | Piezoelectric MEMS Resonators for Density and Viscosity Sensing in Engine Oil with Diesel Fuel at reposiTUm , opens an external URL in a new windowToledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Steindl, W., Schmid, U., & Sànchez-Rojas, J. L. (2015). Piezoelectric MEMS Resonators for Density and Viscosity Sensing in Engine Oil with Diesel Fuel. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 436–439). IEEE.
2014
- | Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes at reposiTUm , opens an external URL in a new windowKucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Luis Sánchez-Rojas, J., Schalko, J., Bittner, A., & Schmid, U. (2014). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 104(23), 233501. https://doi.org/10.1063/1.4882177
- | Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode at reposiTUm , opens an external URL in a new windowKucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Hernando-Garcia, J., Sànchez-Rojas, J. L., Jachimowicz, A., Schalko, J., Bittner, A., & Schmid, U. (2014). Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode. SENSORS AND ACTUATORS B-CHEMICAL, 200, 235–244.
Univ.Ass. Dipl.-Ing. Dr.techn.Georg Pfusterschmied