SiC Technology

Dr. Georg Pfusterschmied

Georg Pfusterschmied studied Materials Science at TU Wien (Austria), with a focus on functional materials as well as micro- and nanotechnology. A significant part of his master’s research was conducted at the University of Toronto (Canada), where he worked on microfabricated piezoelectric thin-film actuators and sensors. During his doctoral studies at TU Wien, he focused on the design, fabrication, and characterization of microtechnologically manufactured liquid sensors. He spent several months as a visiting researcher at the University of Melbourne (Australia) in the group of Prof. John Sader, where he investigated theoretical models of microfluidic interactions and their application to liquid sensing systems. His dissertation was recognized with the prestigious Dr. Ernst Fehrer Award, opens an external URL in a new window.

After completing his PhD, he continued his research at the Institute of Sensor and Actuator Systems at TU Wien, where he independently acquired and led numerous third-party funded projects, including grants from the European Union, the Austrian Research Promotion Agency (FFG), the Christian Doppler Research Association (CDG), and direct industrial collaborations. Since January 1, 2023, he has been the scientific director of the Christian Doppler Laboratory for Sustainable Silicon Carbide Technology, which focuses on the resource-efficient use of silicon carbide (SiC).

Since January 1, 2025, Georg Pfusterschmied has held a Tenure Track Position as part of TU Wien’s Excellence in Research Career Program. His current research centers on thin-film technologies, micro- and nanostructuring, and the materials science of silicon carbide for applications in microsystems technology and power electronics. A particular emphasis is placed on the transfer of fundamental materials research into technology-oriented applications.

He is the author and co-author of numerous peer-reviewed scientific publications, opens an external URL in a new window, presents regularly at international conferences, supervises master’s and doctoral theses, serves as a reviewer for scientific journals, and is actively involved in academic self-governance.

Currently running research projects

CDL-SiC

Woman in cleanroom clothing handling a silicon carbide sample

CD Laboratory for Sustainable Silicon Carbide Technology

Low-Impedance Silicon Oxycarbide Films for Electroacoustic RF Filters

polySiC thin films

A microscopic image of a micro heater with open membrane

Polycrystalline cubic SiC thin films for MEMS

Publications

2025

Moll, P., Pfusterschmied, G., Leitgeb, M., & Schmid, U. (2025). Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply deposition. Materials Science in Semiconductor Processing, 197, Article 109663. https://doi.org/10.1016/j.mssp.2025.109663
| Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply deposition at reposiTUm , opens an external URL in a new window
Huber, D., Schallert, C. A., Pfusterschmied, G., & Schmid, U. (2025). Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS Structures. In SMSI 2025 : Proceedings : Proof reading version (pp. 85–86). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/B2.3
| Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS Structures at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Zellner, C., Schock, D., & Schmid, U. (2025). Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS. In SMSI 2025 : Proceedings : Proof reading version (pp. 81–82). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/B2.1
| Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS at reposiTUm , opens an external URL in a new window
Berger, C., Schiek, M., Schneider, M., Pfusterschmied, G., & Schmid, U. (2025). Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonators. Journal of Applied Physics, 137(14), Article 144502. https://doi.org/10.1063/5.0250701
| Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonators at reposiTUm , opens an external URL in a new window
Moll, P., Pfusterschmied, G., Schmid, B., Schwarz, S., Artner, W., & Schmid, U. (2025). Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applications. SENSORS AND ACTUATORS A-PHYSICAL, 384, Article 116262. https://doi.org/10.1016/j.sna.2025.116262
| Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applications at reposiTUm , opens an external URL in a new window

2024

Berger, C., Schiek, M., Pandit, S., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material. Journal of Applied Physics, 136(14), 1–11. https://doi.org/10.1063/5.0226103
| Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material at reposiTUm , opens an external URL in a new window
Pompei, E., Vlamidis, Y., Ferbel, L., Zannier, V., Rubini, S., Esteban, D. A., Bals, S., Marinelli, C., Pfusterschmied, G., Leitgeb, M., Schmid, U., Heun, S., & Veronesi, S. (2024). Functionalization of three-dimensional epitaxial graphene with metal nanoparticles. Nanoscale, 16(34), 16107–16118. https://doi.org/10.1039/d4nr01986e
| Functionalization of three-dimensional epitaxial graphene with metal nanoparticles at reposiTUm , opens an external URL in a new window
Yang, T., Perazzi, M., Leitgeb, M., Zellner, C., Pfusterschmied, G., & Schmid, U. (2024, September). K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation. ICSCRM 2024: International Conference on Silicon Carbide and Related Materials, Raleigh, United States of America (the).
| K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation at reposiTUm , opens an external URL in a new window
Wahid, S. N., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024). A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer. Materials Science Forum, 1124, 35–41. https://doi.org/10.4028/p-8AEonP
| A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer at reposiTUm , opens an external URL in a new window
Gesing, A. L., Huber, D., Steinmüller-Neth, D., Pfusterschmied, G., Platz, D., & Schmid, U. (2024). Modeling polycrystalline diamond MEMS resonators. In 19th International Workshop on Nanomechanical Sensing (pp. 114–114).
| Modeling polycrystalline diamond MEMS resonators at reposiTUm , opens an external URL in a new window
Huber, D., Platz, D., Loch Gesing, A., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024, June). Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators. MESS24 - Microelectronic Systems Symposium, Wien, Austria.
| Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators at reposiTUm , opens an external URL in a new window
Wahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024, June). A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling. MESS24 - Microelectronic Systems Symposium, Wien, Austria.
| A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling at reposiTUm , opens an external URL in a new window
Ermilova, E., Klapetek, P., Pfusterschmied, G., Nanjappan, C., Schmid, U., & Hertwig, A. (2024, May 29). On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics. EMRS Spring Meeting 2024 - ALTECH 2024, Strasbourg, France.
| On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics at reposiTUm , opens an external URL in a new window
Moll, P., Schwarz, S., Pfusterschmied, G., Artner, W., & Schmid, U. (2024). Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition. Journal of Microelectromechanical Systems, 1–9. https://doi.org/10.34726/7319
| Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition at reposiTUm , opens an external URL in a new window
Berger, C., Schneider, M., Pfusterschmied, G., & Schmid, U. (2024). Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators. Journal of Applied Physics, 135(16), 1–10. https://doi.org/10.1063/5.0197261
| Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators at reposiTUm , opens an external URL in a new window
Moll, P., Pfusterschmied, G., Schwarz, S., Stöger-Pollach, M., & Schmid, U. (2024). Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si. SENSORS AND ACTUATORS A-PHYSICAL, 372, 1–9. https://doi.org/10.1016/j.sna.2024.115376
| Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si at reposiTUm , opens an external URL in a new window
Huber, D., Platz, D., Gesing, A. L., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024). Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators. In Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 915–918). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439421
| Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators at reposiTUm , opens an external URL in a new window
Moll, P., Pfusterschmied, G., & Schmid, U. (2024). Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply Deposition. In IEEE Xplore (Ed.), Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 606–609). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439413
| Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply Deposition at reposiTUm , opens an external URL in a new window
Parmar, P. M., Leitgeb, M., Yadav, M. K., Zellner, C., Wedl, G., Pfusterschmied, G., & Schmid, U. (2024). High-temperature adhesive bonding of 4H-SiC substrates. ICSCRM 2024: INTERNATIONAL CONFERENCE ON SILICON CARBIDE AND RELATED MATERIALS 2024, Raleigh, United States of America (the).
| High-temperature adhesive bonding of 4H-SiC substrates at reposiTUm , opens an external URL in a new window
Perazzi, M., Leitgeb, M., Vengattoor Raghu, A., Zellner, C., Hahn, R., Kirnbauer, A., Schwarz, S., Pfusterschmied, G., & Schmid, U. (2024). High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin Foils. Materials Science Forum, 1124, 43–49. https://doi.org/10.4028/p-D0xoyc
| High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin Foils at reposiTUm , opens an external URL in a new window

2023

Veronesi, S., Vlamidis, Y., Ferbel, L., Marinelli, C., Sanmartin, C., Taglieri, I., Pfusterschmied, G., Leitgeb, M., Schmid, U., Mencarelli, F., & Heun, S. (2023). Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications. Journal of the Science of Food and Agriculture, 1–11. https://doi.org/10.1002/jsfa.13118
| Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications at reposiTUm , opens an external URL in a new window
Wahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2023, September 21). A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer. ICSCRM 2023 . International Conference on Silicon Carbide and Related Materials, Sorrento, Italy.
| A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer at reposiTUm , opens an external URL in a new window
Veronesi, S., Aureliano, A. M., Vlamidis, Y., POMPEI, E., Pfusterschmied, G., Leitgeb, M., Schmid, U., & Heun, S. (2023, September 4). Hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications. CMD30 FisMat 2023, Milan, Italy.
| Hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications at reposiTUm , opens an external URL in a new window
Perazzi, M., Leitgeb, M., Pfusterschmied, G., Vengattoor Raghu, A., Schmid, U., Zellner, C., Schwarz, S., Hahn, R., & Kirnbauer, A. (2023, September). High-temperature Reorganization Behavior of Porous 4H-SiC Thin Foils. ICSCRM2023 - International Conference on Silicon Carbide and Related Materials, Sorrento, Italy.
| High-temperature Reorganization Behavior of Porous 4H-SiC Thin Foils at reposiTUm , opens an external URL in a new window
Nanjappan, C., Pfusterschmied, G., & Schmid, U. (2023). Electrical Characterization of the SiO₂/4H-SiC Interface. In Sensor and Measurement Science International (SMSI 2023) (pp. 235–236). https://doi.org/10.5162/SMSI2023/D5.3
| Electrical Characterization of the SiO₂/4H-SiC Interface at reposiTUm , opens an external URL in a new window
Gesing, A., Tran, T., Huber, D., Steinmüller-Nethl, D., Pfusterschmied, G., Schneider, M., Platz, D., & Schmid, U. (2023). The gas-liquid-Q-factor-inversion in MEMS plate resonators. Journal of Sound and Vibration, 559, Article 117777. https://doi.org/10.1016/j.jsv.2023.117777
| The gas-liquid-Q-factor-inversion in MEMS plate resonators at reposiTUm , opens an external URL in a new window
Macili, A., Vlamidis, Y., Pfusterschmied, G., Leitgeb, M., Schmid, U., Heun, S., & Veronesi, S. (2023). Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications. Applied Surface Science, 615, Article 156375. https://doi.org/10.1016/j.apsusc.2023.156375
| Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications at reposiTUm , opens an external URL in a new window
Moll, P., Pfusterschmied, G., & Schmid, U. (2023). Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 590–593). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052144
| Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS at reposiTUm , opens an external URL in a new window

2022

Moll, P., Pfusterschmied, G., Schneider, M., Dorfmeister, M., Knafl, S., Wanzenböck, H., & Schmid, U. (2022). Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids. Journal of Microelectromechanical Systems, 31(3), 372–383. https://doi.org/10.1109/JMEMS.2022.3163477
| Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids at reposiTUm , opens an external URL in a new window
Veronesi, S., Pfusterschmied, G., Fabbri, F., Leitgeb, M., Arif, O., Esteban, D. A., Bals, S., Schmid, U., & Heun, S. (2022). 3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC. Carbon, 189, 210–218. https://doi.org/10.1016/j.carbon.2021.12.042
| 3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC at reposiTUm , opens an external URL in a new window
Fleckl, G., Pfusterschmied, G., & Schmid, U. (2022). Functional Silicon Oxide Nanolayers for Temperature Sensing on 4H-SiC. 2022 MRS Fall Meeting, Boston, United States of America (the).
| Functional Silicon Oxide Nanolayers for Temperature Sensing on 4H-SiC at reposiTUm , opens an external URL in a new window
Schmid, U., Schneider, M., Leitgeb, M., & Pfusterschmied, G. (2022). SiC Process Technologies for MEMS. MNE 2022 - Eurosensors, Leuven, Belgium.
| SiC Process Technologies for MEMS at reposiTUm , opens an external URL in a new window

2021

Leitgeb, M., Pfusterschmied, G., Schwarz, S., Depuydt, B., Cho, J., & Schmid, U. (2021). Communication-Current Oscillations in Photoelectrochemical Etching of Monocrystalline 4H Silicon Carbide. ECS Journal of Solid State Science and Technology, 10(7), 073003. https://doi.org/10.1149/2162-8777/ac10b3
| Communication-Current Oscillations in Photoelectrochemical Etching of Monocrystalline 4H Silicon Carbide at reposiTUm , opens an external URL in a new window
Moll, P., Pfusterschmied, G., Schneide, M., Dorfmeister, M., & Schmid, U. (2021). Piezoelectric Switching of Bistable MEMS Membranes in Fluids. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), online, Unknown. IEEE. https://doi.org/10.1109/mems51782.2021.9375163
| Piezoelectric Switching of Bistable MEMS Membranes in Fluids at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Triendl, F., Schneider, M., & Schmid, U. (2021). Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights. Materials Science in Semiconductor Processing, 123(105504), 105504. https://doi.org/10.1016/j.mssp.2020.105504
| Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Berger, C., Schwarz, S., Artner, W., & Schmid, U. (2021). Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layer. Thin Solid Films, 721(138539), 138539. https://doi.org/10.1016/j.tsf.2021.138539
| Ti/4H-SiC schottky barrier modulation by ultrathin a-SiC:H interface layer at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Pobegen, G., Schwarz, S., Artner, W., Konrath, J. P., & Schmid, U. (2021). Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiC. Materials Science in Semiconductor Processing, 131(105888), 105888. https://doi.org/10.1016/j.mssp.2021.105888
| Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiC at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Schwarz, S., Artner, W., & Schmid, U. (2021). Si/4H-SiC heterostructure formation using metal-induced crystallization. Materials Science in Semiconductor Processing, 128(105763), 105763. https://doi.org/10.1016/j.mssp.2021.105763
| Si/4H-SiC heterostructure formation using metal-induced crystallization at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Schwarz, S., Pobegen, G., Konrath, J. P., & Schmid, U. (2021). Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes. Semiconductor Science and Technology, 36(5), 055021. https://doi.org/10.1088/1361-6641/abf29b
| Barrier height tuning by inverse sputter etching at poly-Si/4H-SiC heterojunction diodes at reposiTUm , opens an external URL in a new window

2020

Pfusterschmied, G., Weinmann, C., Schneider, M., Platz, D., Shen, N., Sader, J., & Schmid, U. (2020). Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids. Journal of Micromechanics and Microengineering, 30(7), 075004. https://doi.org/10.1088/1361-6439/ab8bc9
| Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids at reposiTUm , opens an external URL in a new window
Schmid, U., Hafner, J., Pfusterschmied, G., Platz, D., & Schneider, M. (2020). High Performance Piezoelectric MEMS Resonators in Fluids. XXII. Linz Winter Workshop 2020, Linz, Austria.
| High Performance Piezoelectric MEMS Resonators in Fluids at reposiTUm , opens an external URL in a new window
Schneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). High performance piezoelectric AlN MEMS resonators for precise sensing in liquids. Elektrotechnik Und Informationstechnik, 137(3), 121–127. https://doi.org/10.1007/s00502-020-00794-w
| High performance piezoelectric AlN MEMS resonators for precise sensing in liquids at reposiTUm , opens an external URL in a new window
Schneider, M., Pfusterschmied, G., Patocka, F., & Schmid, U. (2020). MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren. GIT, 64. JAHRGANG(4–5), 36–38.
| MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Fleckl, G., Schwarz, S., & Schmid, U. (2020). On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC. Thin Solid Films, 697(137837), 137837. https://doi.org/10.1016/j.tsf.2020.137837
| On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Pobegen, G., Konrath, J. P., & Schmid, U. (2020). Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes. Semiconductor Science and Technology, 35(11), 115011. https://doi.org/10.1088/1361-6641/abae8d
| Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes at reposiTUm , opens an external URL in a new window
Triendl, F., Pfusterschmied, G., Zellner, C., Artner, W., Hradil, K., & Schmid, U. (2020). Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization. Materials Letters: X, 6, Article 100040. https://doi.org/10.1016/j.mlblux.2020.100040
| Low-temperature epitaxial Si on 4H-SiC using metal-induced crystallization at reposiTUm , opens an external URL in a new window

2019

Dorfmeister, M., Kössl, B., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/1361-6439/ab3185
| Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Patocka, F., Weinmann, C., Schneider, M., Platz, D., & Schmid, U. (2019). Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids. Sensors and Actuators A: Physical, 295, 84–92. https://doi.org/10.1016/j.sna.2019.05.031
| Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Weinmann, C., Hospodka, M., Hofko, B., Schneider, M., & Schmid, U. (2019). Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea (the Republic of). IEEE. https://doi.org/10.1109/memsys.2019.8870897
| Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS Resonators at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Weinmann, C., Schneider, M., Hospodka, M., Mirwald, J., Hofko, B., & Schmid, U. (2019). Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2019 - Proceedings (pp. 320–323). VDE Verlag GMBH.
| Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren at reposiTUm , opens an external URL in a new window
Triendl, F., Fleckl, G., Schneider, M., Pfusterschmied, G., & Schmid, U. (2019). Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range. Journal of Vacuum Science & Technology B, 37(3), 032903. https://doi.org/10.1116/1.5094137
| Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range at reposiTUm , opens an external URL in a new window

2018

Gillinger, M., Knobloch, T., Markovic, A., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications. Materials Science in Semiconductor Processing, 81, 1–6. https://doi.org/10.1016/j.mssp.2018.02.028
| Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications at reposiTUm , opens an external URL in a new window
Fischeneder, M., Kucera, M., Hofbauer, F., Pfusterschmied, G., Schneider, M., & Schmid, U. (2018). Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback. Sensors and Actuators B: Chemical, 260, 198–203. https://doi.org/10.1016/j.snb.2018.01.001
| Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback at reposiTUm , opens an external URL in a new window
Platz, D., Pfusterschmied, G., & Schmid, U. (2018). Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130896
| Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators at reposiTUm , opens an external URL in a new window
Platz, D., Pfusterschmied, G., & Schmid, U. (2018). Theoretical Framework for modelling the fluid-structure interaction of complex MEMS/NEMS resonator eigenmodes. In Proceedings of the Euromech Colloquium 603 (pp. 38–40). Universidade do Porto, Reitoria.
| Theoretical Framework for modelling the fluid-structure interaction of complex MEMS/NEMS resonator eigenmodes at reposiTUm , opens an external URL in a new window
Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2018). Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids. Microsystem Technologies, 24(3), 1423–1431. https://doi.org/10.1007/s00542-017-3536-0
| Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids at reposiTUm , opens an external URL in a new window
Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2018). Flow-through sensor based on piezoelectric MEMS resonator for thein-line monitoring of wine fermentation. Sensors and Actuators B: Chemical, 254, 291–298. https://doi.org/10.1016/j.snb.2017.07.096
| Flow-through sensor based on piezoelectric MEMS resonator for thein-line monitoring of wine fermentation at reposiTUm , opens an external URL in a new window

2017

Pfusterschmied, G., Kucera, M., Steindl, W., Bittner, A., Schneider, M., & Schmid, U. (2017). Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren. In MikroSystemTechnik Kongress 2017 - Proceedings (pp. 183–186). VDE Verlag GMBH.
| Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Kucera, M., Weinmann, C., Schneider, M., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2017). Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties. In IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017 (pp. 1013–1016). IEEE.
| Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Toledo, J., Kucera, M., Steindl, W., Zemann, S., Ruiz-Díez, V., Schneider, M., Bittner, A., Sanchez-Rojas, J., & Schmid, U. (2017). Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. Micromachines, 8(7), 200. https://doi.org/10.3390/mi8070200
| Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring at reposiTUm , opens an external URL in a new window
Ruiz-Díez, V., Toledo, J., Hernando-Garcia, J., Pfusterschmied, G., & Schmid, U. (2017). Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 9). SPIE.
| Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators at reposiTUm , opens an external URL in a new window
Schneider, M., Mayrhofer, P., Gillinger, M., Pfusterschmied, G., & Schmid, U. (2017). Piezoelectric MEMS: Material Aspects and Devices. AMA Conferences 2017 - SENSOR 2017 and IRS² 201, Nürnberg, Germany.
| Piezoelectric MEMS: Material Aspects and Devices at reposiTUm , opens an external URL in a new window
Toledo, J., Ruiz-Díez, V., Pfusterschmied, G., & Schmid, U. (2017). Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators. In Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII (p. 11). SPIE.
| Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators at reposiTUm , opens an external URL in a new window
Toledo, J., Ruiz-Díez, V., Sànchez-Rojas, J. L., Pfusterschmied, G., Schneider, M., & Schmid, U. (2017). Wine Fermentation Sensor Based on Piezoelectric Resonators. In IEEE Sensors 2017 - Proceedings (pp. 1–3). IEEE.
| Wine Fermentation Sensor Based on Piezoelectric Resonators at reposiTUm , opens an external URL in a new window

2016

Pfusterschmied, G., Kucera, M., Steindl, W., Manzaneque, T., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Roof tile-shaped modes in quasi free-free supported piezoelectric microplate resonators in high viscous fluids. Sensors and Actuators B: Chemical, 237, 999–1006. https://doi.org/10.1016/j.snb.2016.02.029
| Roof tile-shaped modes in quasi free-free supported piezoelectric microplate resonators in high viscous fluids at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Kucera, M., Toledo, J., Steindl, W., Ruiz-Díez, V., Bittner, A., Schneider, M., Sànchez-Rojas, J. L., & Schmid, U. (2016). Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators. In Proceedings of the 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016) (p. 2). IEEE.
| Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators at reposiTUm , opens an external URL in a new window
Ruiz-Díez, V., Hernando-García, J., Toledo, J., Manzaneque, T., Kucera, M., Pfusterschmied, G., Schmid, U., & Sánchez-Rojas, J. L. (2016). Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media. Journal of Micromechanics and Microengineering, 26(8), 084008. https://doi.org/10.1088/0960-1317/26/8/084008
| Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media at reposiTUm , opens an external URL in a new window
Toledo, J., Manzaneque, T., Ruiz-Díez, V., Jimenez-Molinos, F., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2016). Comparison of in‑plane and out‑of‑plane piezoelectric microresonators for real‑time monitoring of engine oil contamination with diesel. Microsystem Technologies, 22, 1781–1790.
| Comparison of in‑plane and out‑of‑plane piezoelectric microresonators for real‑time monitoring of engine oil contamination with diesel at reposiTUm , opens an external URL in a new window
Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sánchez-Rojas, J. L. (2016). Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids. Journal of Micromechanics and Microengineering, 26(8), 084012. https://doi.org/10.1088/0960-1317/26/8/084012
| Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids at reposiTUm , opens an external URL in a new window

2015

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sànchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 107, 0535061–0535065. https://doi.org/10.1063/1.4928429
| Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes at reposiTUm , opens an external URL in a new window
Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Sánchez-Rojas, J. L., Schalko, J., Bittner, A., & Schmid, U. (2015). Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminiumnitride- actuated self-sensing micro-resonators in liquid media. Applied Physics Letters, 107(5), 053506. https://doi.org/10.1063/1.4928429
| Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminiumnitride- actuated self-sensing micro-resonators in liquid media at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Kucera, M., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2015). Multi Roof Tile-Shaped Vibration Modes In Mems Cantilever Sensors For Liquid Monitoring Purposes. In MEMS 2015 (pp. 718–721). IEEE.
| Multi Roof Tile-Shaped Vibration Modes In Mems Cantilever Sensors For Liquid Monitoring Purposes at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Kucera, M., Wistrela, E., Manzaneque, T., Ruiz-Díez, V., Sánchez-Rojas, J. L., Bittner, A., & Schmid, U. (2015). Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids. Journal of Micromechanics and Microengineering, 25(10), 105014. https://doi.org/10.1088/0960-1317/25/10/105014
| Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids at reposiTUm , opens an external URL in a new window
Pfusterschmied, G., Kucera, M., Wistrela, E., Steindl, W., Ruiz-Díez, V., Bittner, A., Sànchez-Rojas, J. L., & Schmid, U. (2015). Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 969–972). IEEE.
| Piezoelectric Response Optimization of Multi Roof-Tile Modes in MEMS Resonators by Variation of the Support Boundary Conditions at reposiTUm , opens an external URL in a new window
Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2015). Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·s. In MME 2015 - 26th MicroMechanics Europe Workshop. MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien, EU.
| Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·s at reposiTUm , opens an external URL in a new window
Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Schmid, U., & Sànchez-Rojas, J. L. (2015). Out-of-plane Piezoelectric Microresonator and Oscillator Circuit for Monitoring Engine Oil Contamination with Diesel. In Proc. of SPIE Vol. 9517-9520 (p. 9). SPIE.
| Out-of-plane Piezoelectric Microresonator and Oscillator Circuit for Monitoring Engine Oil Contamination with Diesel at reposiTUm , opens an external URL in a new window
Toledo, J., Manzaneque, T., Ruiz-Díez, V., Kucera, M., Pfusterschmied, G., Wistrela, E., Steindl, W., Schmid, U., & Sànchez-Rojas, J. L. (2015). Piezoelectric MEMS Resonators for Density and Viscosity Sensing in Engine Oil with Diesel Fuel. In Proceedings of the 18th International Conference On Solid State Sensors and Actuators - Transducers 2015 (pp. 436–439). IEEE.
| Piezoelectric MEMS Resonators for Density and Viscosity Sensing in Engine Oil with Diesel Fuel at reposiTUm , opens an external URL in a new window

2014

Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Luis Sánchez-Rojas, J., Schalko, J., Bittner, A., & Schmid, U. (2014). Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Applied Physics Letters, 104(23), 233501. https://doi.org/10.1063/1.4882177
| Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes at reposiTUm , opens an external URL in a new window
Kucera, M., Wistrela, E., Pfusterschmied, G., Ruiz-Díez, V., Manzaneque, T., Hernando-Garcia, J., Sànchez-Rojas, J. L., Jachimowicz, A., Schalko, J., Bittner, A., & Schmid, U. (2014). Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode. SENSORS AND ACTUATORS B-CHEMICAL, 200, 235–244.
| Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode at reposiTUm , opens an external URL in a new window

Senior researcher

Univ.Ass. Dipl.-Ing. Dr.techn.Georg Pfusterschmied

Phone: +43 1 58801 36649 Call Georg Pfusterschmied

Send email to Georg Pfusterschmied

Senior researcher

Univ.Ass. Dipl.-Ing. Dr.techn.Georg Pfusterschmied

Phone: +43 1 58801 36649 Call Georg Pfusterschmied

Send email to Georg Pfusterschmied

Name	Purpose	Lifetime	Type	Provider
CookieConsent	Saves your settings for the use of cookies on this website.	1 year	HTML	Homepage TU Wien
SimpleSAML	This is needed to distinguish between the sessions of the logged-in users.	session	HTTP	Login TU Wien
SimpleSAMLAuthToken	This is needed to distinguish between the sessions of the logged-in users.	session	HTTP	Login TU Wien
fe_typo_user	Is needed so that in case of a Typo3 frontend login the session ID is recognized to grant access to protected areas.	session	HTTP	Homepage TU Wien
staticfilecache	Is needed to optimize the delivery time of the website.	session	HTTP	Homepage TU Wien
JESSIONSID	Is needed so that in case of a LectureTube the session ID is recognized to grant access to protected areas.	session	HTTP	LectureTube TU Wien
_shibsession_lecturetube	This is needed to distinguish between the sessions of the logged-in users.	session	HTTP	LectureTube TU Wien

Name	Purpose	Lifetime	Type	Provider
_pk_id	Used to store a few details about the user such as the unique visitor ID.	13 months	HTML	Matomo TU Wien
_pk_ref	Is used to store the information of the users home website.	6 months	HTML	Matomo TU Wien
_pk_ses	Is needed to store temporary data of the visit.	30 minutes	HTML	Matomo TU Wien
nmstat	Is used to record the behaviour on the website. It is used to collect statistics about website usage, such as when the visitor last visited the website. The cookie does not contain any personal data and is only used for website analysis.	1000 days	HTML	Siteimprove
siteimproveses	Is used to track the sequence of pages that a visitor views during his/her visit to the website. The cookie does not contain any personal data and is used solely for website analysis.	session	HTTP	Siteimprove
AWSELB	Always occurs in pairs with siteimproveses (for load balancing on the provider server)	session	HTTP	Siteimprove

Name	Purpose	Lifetime	Type	Provider
_ga	Is needed to distinguish the sessions of the users from each other.	persistent	HTTP	Google Analytics
_gali	Is needed to determine which links are clicked on a page.	expires immediately	HTTP	Google Analytics
_gat	This is a function-related cookie, whose tasks may differ.	2 years	HTTP	Google Analytics
_gid	Is needed to distinguish users and create statistics.	24 hours	HTTP	Google Analytics
_gads	Required to enable websites to display advertising from Google, including personalized advertising.	13 months	HTTP	Google Analytics
_gac_	Required by advertisers to measure user activity and the performance of their advertising campaigns.	90 days	HTTP	Google Analytics
_gcl_	Required by advertisers to determine how often users who click on their ads end up taking an action on their website.	90 days	HTTP	Google Analytics
_gcl_au	Contains a randomly generated user ID.	90 days	HTTP	Google
_gcl_aw	Is set when users click on a Google ad on the website and contains information about which ad was clicked.	90 days	HTTP	Google
__utma	Is used to record visits and visitors.	2 years	HTTP	Google Analytics
__utmb	Is used to detect new visits.	30 minutes	HTTP	Google Analytics
__utmc	Is used in connection with __utmb to determine whether it is a new (recent) visit.	session	HTTP	Google Analytics
__utmd	Is used to store and track visitor journeys through the site and classifies them into groups (marketing/tracking).	1 second	HTTP	Google Analytics
__utmt	Is needed to limit the query rate on Google Analytics.	10 minutes	HTTP	Google Analytics
__utmz	Is needed to determine from which source/campaign visitors come.	6 months	HTTP	Google Analytics
__utmvc	Is needed to collect information about user behavior on multiple websites. This information is used to optimize the relevance of advertising on the website.	24 hours	HTTP	Google AdSense
utm_source	Is needed to tag URLs with parameters to identify the campaigns that forward traffic.	expires immediately	HTTP	Google Analytics
__utm.gif	Is needed to save browser details.	session	HTTP	Google Analytics
gtag	Is needed to perform remarketing.	30 days	HTTP	Google AdSense
id	Is needed to perform remarketing.	2 years	HTTP	Google AdWords
1P_JAR	Is needed to optimize advertising, provide ads that are relevant to users, improve campaign performance reports, or prevent users from seeing the same ads more than once.	2 years	HTTP	Google
AID	Is needed to activate targeted advertising.	2 years	HTTP	Google Analytics
ANID	Is needed to display Google ads on non-Google websites.	2 years	HTTP	Google AdSense
APISID	Unknown functionality	2 years	HTTP	Google Ads Optimization
AR	Is needed to profile visitors' interests and display relevant ads on other websites. This cookie works by uniquely identifying your browser and device.	2 years	HTTP	Google AdSense
CONSENT	Is needed to store the preferences of visitors and personalize advertising.	persistent	HTTP	Google
DSID	Is needed by DoubleClick for advertising displayed in various places on the web and used to store the preferences of users.	2 years	HTTP	Doubleclick
DV	Is needed to store user preferences and other information. This includes, in particular, the preferred language, the number of search results to be displayed on the page, and the decision whether or not to activate the Google SafeSearch filter.	2 years	HTTP	Google
HSID	Contains the Google account ID and the last login time of the user.	2 years	HTTP	Google
IDE	Is needed by DoubleClick to record and report the actions of users on the website after viewing or clicking on one of the provider's ads, with the purpose of measuring the effectiveness of an advertisement and displaying targeted advertisements to users.	2 years	HTTP	Doubleclick
LOGIN_INFO	Is used to store the credentials of users of Google services.	2 years	HTTP	Google
NID	Is used to store information about user settings.	6 months	HTTP	Google
OTZ	Is needed to link activities of visitors with other devices that are previously logged in via the Google account. In this way, advertising is tailored to different devices.	1 month	HTTP	Google
RUL	Is needed by DoubleClick to determine whether advertising has been displayed correctly in order to make marketing activities more efficient.	1 year	HTTP	Doubleclick
SAPISID	Is needed by YouTube to store user settings and to calculate user bandwidth.	persistent	HTTP	Google
SEARCH_SAMESITE	Enables servers to mitigate the risk of CSRF and information leakage attacks by specifying that a particular cookie may only be sent on requests originating from the same registerable domain.	6 months	HTTP	Google
SID	Contains the Google account ID and the last login time of the user.	2 years	HTTP	Google
SIDCC	Is needed to store information about user settings and information for Google Maps.	3 months	HTTP	Google
SSID	Is needed to collect visitor information for videos hosted by YouTube on Google Maps integrated maps.	persistent	HTTP	Google
__SECURE-1PAPISID	Is needed for targeting purposes to create a profile of the interests of website visitors.	2 years	HTTP	Google
__SECURE-1PSID	Is needed for targeting purposes to create a profile of the interests of website visitors.	2 years	HTTP	Google
__SECURE-3PAPISID	Is needed for targeting purposes to create a profile of the interests of website visitors.	2 years	HTTP	Google
__SECURE-3PSID	Is needed for targeting purposes to create a profile of the interests of website visitors.	2 years	HTTP	Google
__SECURE-3PSIDCC	Is needed for targeting purposes to create a profile of the interests of website visitors.	2 years	HTTP	Google
__SECURE-APISID	Is needed to profile the interests of website visitors in order to display relevant and personalized advertising through retargeting.	8 months	HTTP	Google
__SECURE-HSID	Is needed to secure digitally signed and encrypted data from the unique Google ID and to store the last login time that Google uses to identify visitors, prevent fraudulent use of login data, and protect visitor data from unauthorized parties. This may also be used for targeting purposes to display relevant and personalized advertising content.	8 months	HTTP	Google
__SECURE-SSID	Is needed to store information about how visitors use the site and about the ads they may have seen before visiting the site. Also used to customize ads on Google domains.	8 months	HTTP	Google
test_cookie	Is set as a test to check whether the browser allows cookies to be set. Does not contain any identification features.	15 minutes	HTTP	Google
VISITOR_INFO1_LIVE	Is needed by YouTube to store user settings and to calculate user bandwidth.	6 months	HTTP	Youtube
facebook	Is used to Enable ad delivery or retargeting	90 days	HTTP	Meta (Facebook)
__fb_chat_plugin	Is needed to store and track interactions (marketing/tracking).	persistent	HTTP	Meta (Facebook)
_js_datr	Is needed to save user settings.	2 years	HTTP	Meta (Facebook)
_fbc	Is needed to save the last visit (marketing/tracking).	2 years	HTTP	Meta (Facebook)
fbm	Is needed to store account data (marketing/tracking).	1 year	HTTP	Meta (Facebook)
xs	Is needed to store a unique session ID (marketing/tracking).	1 year	HTTP	Meta (Facebook)
wd	Is needed to log the screen resolution.	1 week	HTTP	Meta (Facebook)
fr	Is needed to serve ads and measure and improve their relevance.	3 months	HTTP	Meta (Facebook)
act	Is needed to store logged in users (marketing/tracking).	90 days	HTTP	Meta (Facebook)
_fbp	Is needed to store and track visits to various websites (marketing/tracking).	3 months	HTTP	Meta (Facebook)
datr	Is needed to identify the browser for security and website integrity purposes, including account recovery and identification of potentially compromised accounts.	2 years	HTTP	Meta (Facebook)
dpr	Is used for analysis purposes. Technical parameters are logged (e.g. aspect ratio and dimensions of the screen) so that Facebook apps can be displayed correctly.	1 week	HTTP	Meta (Facebook)
sb	Is needed to store browser details and security information of the Facebook account.	2 years	HTTP	Meta (Facebook)
dbln	Is needed to store browser details and security information of the Facebook account.	2 years	HTTP	Meta (Facebook)
spin	Is needed for promotional purposes and social campaign reporting.	session	HTTP	Meta (Facebook)
presence	Contains the "chat" status of logged in users.	1 month	HTTP	Meta (Facebook)
cppo	Is needed for statistical purposes.	90 days	HTTP	Meta (Facebook)
locale	Is needed to save the language settings.	session	HTTP	Meta (Facebook)
pl	Required for Facebook Pixel.	2 years	HTTP	Meta (Facebook)
lu	Required for Facebook Pixel.	2 years	HTTP	Meta (Facebook)
c_user	Required for Facebook Pixel.	3 months	HTTP	Meta (Facebook)
bcookie	Is needed to store browser data (marketing/tracking).	2 years	HTTP	LinkedIn
li_oatml	Is needed to identify LinkedIn members outside of LinkedIn for advertising and analytics purposes.	1 month	HTTP	LinkedIn
BizographicsOptOut	Is needed to save privacy settings.	10 years	HTTP	LinkedIn
li_sugr	Is needed to store browser data (marketing/tracking).	3 months	HTTP	LinkedIn
UserMatchHistory	Is needed to provide advertising or retargeting (marketing/tracking).	30 days	HTTP	LinkedIn
linkedin_oauth_	Is needed to provide cross-page functionality.	session	HTTP	LinkedIn
lidc	Is needed to store performed actions on the website (marketing/tracking).	1 day	HTTP	LinkedIn
bscookie	Is needed to store performed actions on the website (marketing/tracking).	2 years	HTTP	LinkedIn
X-LI-IDC	Is needed to provide cross-page functionality (marketing/tracking).	session	HTTP	LinkedIn
AnalyticsSyncHistory	Stores the time when the user was synchronized with the "lms_analytics" cookie.	30 days	HTTP	LinkedIn
lms_ads	Is needed to identify LinkedIn members outside of LinkedIn.	30 days	HTTP	LinkedIn
lms_analytics	Is needed to identify LinkedIn members for analytics purposes.	30 days	HTTP	LinkedIn
li_fat_id	Required for indirect member identification used for conversion tracking, retargeting and analytics.	30 days	HTTP	LinkedIn
U	Is needed to identify the browser.	3 months	HTTP	LinkedIn
_guid	Is needed to identify a LinkedIn member for advertising via Google Ads.	90 days	HTTP	LinkedIn

SiC Technology

Dr. Georg Pfusterschmied

Currently running research projects

CDL-SiC

Completed research projects

POWERELEC

RESONANCE

LOWLOSSMIRROR

polySiC thin films

Publications

2025

2024

2023

2022

2021

2020

2019

2018

2017

2016

2015

2014

Senior researcher

Univ.Ass. Dipl.-Ing. Dr.techn.Georg Pfusterschmied

Senior researcher

Univ.Ass. Dipl.-Ing. Dr.techn.Georg Pfusterschmied