Univ.Prof. Dipl.-Phys. Dr.rer.nat. Ulrich Schmid

Ulrich Schmid started studies in physics and mathematics in 1992. He performed his diploma work at the research laboratories of the Daimler–Benz AG on the electrical characterization of silicon carbide microelectronic devices for high temperature applications. In 1999, he joined the research laboratories of Daimler–Chrysler AG (now Airbus Group) in Ottobrunn/Munich. He developed a robust fuel injection rate sensor for automotive diesel engines and received his Ph.D. degree in 2003. From 2003 to 2008, he was a post-doc at the Chair of Micromechanics, Microfluidics/Microactuators at Saarland University. Since October 2008, he is a full professor for Microsystems Technology at TU Wien.

Research areas


PiezoMEMS sensor glued in a ceramic package with two silicon beams with electrodes

© Dr. Georg Pfusterschmied

MEMS components based on the piezoelectric effect have many advantages over capacitive or thermal conversion principles. However, since the effect is typically very small, a major challenge lies in developing components that can still interact sufficiently with their environment.

Modeling and Simulation

Simulation of fluid movement around a vibrating beam

© Dr. Georg Pfusterschmied

Simulationen sind aus dem Designprozess moderner MEMS/NEMS-Strukturen nicht mehr wegzudenken. Die Größenstrukturen von MEMS/NEMS-Devices verhindern oft den Einsatz von numerischen Standardmethoden. Wir nutzen moderne Methoden der Numerischen Mathematik zur Entwicklung von für MEMS/NEMS maßgeschneiderte Simulationsmethoden. Ein Schwerpunkt unserer Arbeit ist die Kopplung von MEMS/NEMS-Devices und ihrer Umgebung. Hier spielen besonders fluidische Interaktionen eine wichtige Rolle für viele Anwendungen.

SiC Technology

[Translate to English:] ad

© Dr. Georg Pfusterschmied

Silicon carbide-based electronic components are in the fast lane! Silicon carbide has become indispensable in micro heaters for high-temperature gas sensors or in low-loss electronic power devices in fast charging stations for electric cars.

The team around Dr. Georg Pfusterschmied and Dr. Markus Leitgeb makes a decisive contribution by researching new device concepts and technologies for a resource-efficient exploitation of this high-tech material in the clean rooms at TU Wien.