Piezoelectric MEMS devices

MEMS components based on the piezoelectric effect have many advantages over capacitive or thermal conversion principles. However, since the effect is typically very small, a major challenge lies in developing components that can still interact sufficiently with their environment.

Current Projects

CD-Lab PiezoMEMS

[Translate to English:] Laborleiter mit Wafer

We investigate the sources of noise in piezoelectric materials and non-linear effects in bi-stable microstructures. This will enable more precise microsensors and stronger microactuators in the future.

Advanced piezo and flexoelectric materials

Piezoelectric thin films enable the direct conversion of electrical and mechanical energy and can therefore be used both as sensor layers and as actuator layers. The integration of material systems such as aluminum nitride (AlN) or polyvinylidene fluoride (PVDF) and polyvinylidene fluoride-co-trifluoroethylene (PVDF-TrFE) into existing MEMS technology processes requires an in-depth understanding of the relationship between manufacturing and material properties.

A non-linear electro-mechanical coupling that occurs especially with thin layers <100 nm is the flexoelectric effect. In this effect, inhomogeneous strain of the material induces polarization. The flexo-electric can even outweigh the piezoelectric effect in thin layers, making it a highly exciting topic for future ultrathin MEMS and NEMS.

Current Projects

Alternative dopands for AlXN

Crystal structure of aluminum nitride, where individual aluminum atoms have been replaced by other elements.

Within the framework of this project, alternative dopants for the AlXN material system are being investigated.

Polymeric Nanocomposites for wearable autonomous energy supplies

Artist's rendering of the semi-crystalline matrix of PVDF

PRINCESS investigates advanced nanocomposite materials based on PVDF or nanocellulose with embedded nanoparticles for improved dielectric and piezoelectric properties, as well as the process technology for integrating these materials into the manufacture of smart textiles.