Welcome

The research division Microsystems technology at the Institute of Sensor and Actuator Systems, opens an external URL in a new window is focusing on the modeling, the simulation, the fabrication and the charaterization of komplex 3D structures at a micro- or nano-scale. Our goals are the development of innovative sensor concepts as well as the optimization of existing sensor systems in terms of its robustnest, reliability and flexibility.

Research

Microsystem based on several free-standing beams

MEMS Technology Lab

MEMS Measurement Lab

Measurement lab with multiple measurement systems

Team

Publications

Library with a showcase in the foreground

Contact

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