Electron spectroscopy is a spectroscopic method for material analysis. It is based on the removal of electrons from the outer shells of the atomic shell. The term also serves as a collective term for analytical methods in which electrons are removed from inner shells by irradiated electrons, UV- or X-rays. The kinetic energy of these electrons is then measured directly or determined from subsequent processes with secondary electron emission or radiation. For this purpose, an electron spectrometer is used to determine the strength of an electron current as a function of the kinetic energy of the electrons.

The following three electron spectrometers are available at the AIC:

• u-Focus with Phoibos WAL Analysator
• Versaprobe III with Gas-Cluster-Ionen Source
• PHI 710 with EDS and FIB