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Scientific Imaging & Metrology Systems

MES
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  3. Scientific Imaging & Metrology Systems /
SpecTrackular Illustration of a telescope projecting light onto a satellite in orbit, with a background of spectral lines

(2024 - 2027)
This project aims to develop an optical telescope system capable of spectroscopic analysis of space debris. In order to achieve the high-precision telescope pointing and tracking required for this application, a self-learning pointing model and an improvement of orbit prediction based on obtained data will be developed. Ultimately, spectroscopic analysis can give information on the material, pose and rotation of space debris.

MobileSpectro FTIR spectra showing intensity vs. wavenumber (σ, 0–7000 cm⁻¹) and absorption spectrum with strong peaks around 1000–3000 cm⁻¹.

MobileSpectro – Development of a handheld FTIR spectrometer (2022 - 2025)

Infrared spectroscopy is a fundamental technique for the characterization and analysis of chemical compounds. MobileSpectro aims to develop a miniaturized high precision FTIR spectrometer that enables handheld operation for field use and provides a performance comparable to lab-based instruments.

ConvoyFence ConvoyFence logo showing a vehicle with mounted optical system targeting a drone.

(2021 - 2024)

This project aims at the development and integration of a vibration isolation platform with the main target application of optical drone identification systems in mobile scenarios. It will be integrated into existing vehicles to provide early and effective information for the protection of convoys against UAV threats.

AC-KPFM Schematic of the AC-KPFM experimental setup with a gold-coated cantilever in liquid environment, a laser beam for deflection readout, and a sample on an XYZ scanner.

(2020 - 2024)

The knowledge of the electrical surface charge distribution at the nanoscale is beneficial for many research areas including biological and material sciences. Kelvin Probe Force Microscopy (KPFM) is considered an eligible tool for the quantitative determination thereof. Current methods utilize a DC-Bias for the measurement of the charge distribution, which is not desirable when operating in liquid environments or on semiconductors. This project aims to bypass the parasitic effects of current methods and to enable quantitative surface potential measurments in DC-Bias critical environments.

Atomic Force Microscopy using self-sensing cantilevers Project logo for self-sensing cantilever AFM, showing a stylized cantilever approaching a sample.

In Atomic Force Microscopy (AFM), micro-cantilevers with a sharp tip are scanned over a sample to measure various surface properties with nanometer resolution. The measurement of the cantilever deflection is a crucial part, which defines the imaging performance of AFM. Self-sensing cantilevers with integrated piezoresistive or capacitive elements enable a direct and efficient deflection measurement and are a promising alternative to the conventional optical lever method. This project aims at enabling novel AFM methods and applications by exploiting the advantages of self-sensing cantilevers.

SuRF CAD model of the SuRF measurement system with microscope, probe station, and wafer holder for RF semiconductor characterization.

Sub-Mikrometer Rastersonden-basierte Charakterisierung von HF-Halbleiterprodukten auf Waferebene (2021 - 2024)

RF systems belong to the key components of modern technologies such as radar for environmental detection for safe automated driving through night and fog and Internet of Things devices like 5G telecommunication chips. The goal of the SuRF project is the development of a wafer-level scanning probe system for characterization and testing of radio frequency (RF) and millimeter wave (mmWave) semiconductor products with sub-micrometer precision.

RF-AFM Schematic principle of RF-AFM: AFM tip over circuit test points

(2018 - 2021)

The accurate measurement of local RF-voltages within integrated circuits is crucial for the development of miniaturized electronic devices. Contactless probing techniques are considered a promising approach to overcome the space limitations imposed by the size of required contact pads used in conventional probing techniques. This project aims at developing a scanning probe based measurement system capable of mapping voltages within RF-devices with sub-um spatial resolution.

AUTOScan MEMS scanning mirror chip in ceramic housing with gold contact pads.

Versatile technology platform for MEMS scan system for automotive safety applications (2021 - 2024)

Advancements of sensors, communication and artificial intelligence are about to bring a revolutionary changes in mobility and transportation by autonomous driving. Scanning mirrors based on Micro-Electro-Mechanical Systems (MEMS) technologies are one of the promising solutions for various automotive applications, e.g. photonic sensing such as lidars and human machine interfaces such as augmented reality head -up display (AR HUD) and smart headlights. The AUTOScan project aims for automotive grade MEMS scanning systems for robust sensing and imaging in harsh automotive environmental conditions, enabling reliable MEMS lidars and AR HUDs.

PriMActO Telescope with support structure, showing coordinate axes (x, y, z) for mirror alignment.

(2019 - 2022)

This project aims for the analysis, development and integration of an active primary mirror cell for mid-sized telescope systems between 60 cm and 2 m. Based on an integrated mechatronic system design and a modular approach, an extremely lightweight construction as well as great imaging performance and cost-efficient solution shall be reached.

OptoFence II Drone tracked by a telescope with, shown in crosshairs.

(2020 - 2023)

The project aims to develop a telescope-based, mobile optical system for the detection, identification, and precise tracking of UAVs within a significantly larger observation radius than was previously possible. The integrated camera system enables real-time reconnaissance and tracking of the target object, allowing for analysis of the existing threat potential. Thanks to the significantly extended range of the proposed system, potential threats can be detected in good time, enabling the targeted selection and coordination of necessary defensive measures.

Precision robotic inline metrology for freeform surfaces KUKA industrial robot arm with measurement module, labeled components (Cap. IPS, PSD, VCA, FSM, CCS, Cap. TS), and supporting frame.

High precision in-line measurements on free form surfaces are considered a key factor for the industrial production of the future. Robot-based measurement systems provide the required flexibility but are typically lacking the required precision. The scope of this project is the development of a measurement platform designed as end effector for industrial robots, which carries a measurement or inspection tool and compensates for environmental disturbances, enabling precision 3D measurements on both arbitrarily oriented and moving samples.

High-precision electrical AFM modes for biological applications Schematic of Kelvin Probe Force Microscopy (KFM), with an AFM tip scanning a sample while applying AC and DC voltages.

(2016 - 2018)

Electrical modes of Atomic Force Microscopy (AFM) allow the high-resolution mapping of surface charges on a sample with nanometer precision. A particular measurement challenge is to perform such modes on biological samples (tissue extracts, biomolecules, biomembranes, etc). To this end, the project aims to investigate different preparation and measurement approaches and a specific goal is to determine alterations of surface charge of biological fibers caused by the reaction with sugar, which has important implications in medicine and cell biology.

LiDcAR Close-up of MEMS mirror chip with labeled components: mirror surface, leaf springs, torsion bar, and comb-drive.

High resolution long range Lidar for autonomous driving (2017 - 2020)

Lidar is an acronym for light detection and ranging, in analogy to radar. Lidar has received much attention in the automotive industry as a key component for high level automated driving systems. Compared to other sensing techniques such as stereo cameras and radar, lidar can provide high resolution and highly accurate 3D measurements of the surroundings and robust detection in various weather conditions.

SatComScope Laboratory telescope setup with mounted optical components and electronics for free-space communication experiments.

(2016 - 2019)

This project aims to integrate adaptive optics (AO) technology into small-sized telescope systems of the industrial partner, ASA Astrosysteme, in order to enable free space optical (FSO) communication between satellites and optical ground stations. Compared to radio-frequency communication, this yields a potential increase of the data rate of more than 1 order of magnitude, while simultaneously significantly reducing the emitting power and weight on the satellite.

TracSat Laboratory setup with precision mount for satellite tracking. Open housing reveals electronics and cabling on optical table.

The precise tracking of high velocity satellites with ground based optical telescopes is a prerequisite for a number of future applications such as optical satellite communication, observation of space debris or satellite laser ranging. To achieve this goal, good mechatronic design as well as high performance control are necessary. Together with our industrial partner, ASA Astrosysteme GmbH, this project aims on increasing the achievable precision and tracking velocity of existing ASA ground stations.

IQ AFM AFM and KPFM measurements of a rectangular PMMA structure on a surface. (A) Topography image shows height variations up to 10 nm over a 2 µm scale. (B) KPFM potential map with contrast between −100 mV and +200 mV. (C) AC-KPFM amplitude image with values from −400 mV to +200 mV. (D) AC-KPFM potential reconstruction showing potential range −100 mV to +200 mV.

Imaging, handling and manipulation of material with high resolution are important techniques for various applications of research. Atomic force microscopes (AFM) are one of the most important tools for imaging applications with spatial resolution beyond the diffraction limit of light. The project aims is to build a basic AFM-system in cooperation with Anton Paar GmbH.

SOS Close-up of a mounted galvanometer scanner with reflective mirror, used for fast optical beam steering.

Scanning optical point- and line-sensor

To overcome the limitation for better productivity and reliability of production in this project, a rotating or steering mirror scans the sensor’s optical point or line over a product surface, targeting triangulation, confocal, and color sensors.

DOC Laboratory measurement setup for testing highly divergent optical components.

Characterization of highly divergent optics

Opto-mechatronic devices such as triangulation sensors or chromatic confocal sensors project focused light beams onto the surface of the measuring object. Assessing the properties of the focused beam is essential as they are directly related to the achievable measurement resolution and precision of the opto-mechatronic device.

Vibrostop AFM Photograph of the Vibrostop AFM experimental setup. Rigid metal frame with integrated actuators and sensors for vibration isolation. Cables with colored markers visible. Red label “Sample down” on sample holder.

Atomic Force Microscopy capable of vibration isolation

An atomic force microscope (AFM) can image and inspect a sample surface with high resolution by scanning a probe with a sharp tip over the sample. During scanning, the vertical position of the probe with respect to the sample typically needs to be regulated with nanometer resolution. For the required high resolution, AFMs are sensitive to vibrations transmitted from the floor dependent on their design.

aim4np Experimental aim4np hardware setup in the lab with mounted metrology platform, AFM system, actuators, sensors, and control electronics connected with cables.

Automated in-line metrology for nanopositioning systems

Robot based in-process metrology is a key enabling technology for upcoming production systems and is considered as one of the most important preconditions for future production. Measuring properties at the nanometer scale such as topography, morphology and roughness within a production line becomes increasingly important for quality control and process monitoring tasks to make high tech production more efficient.

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