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In the form below: some fields allow input, some do not. Press RETURN to recalculate results. Values of read-only fields will be recalculated than. You might not be extra informed about the changes.



Based on empirical equations for sputter yields at normal incidence by N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, and H. Tawara, in Energy Dependence of the Yields of Ion-Induced Sputtering of Monatomic Solids, IPPJ-AM-32 (Institute of Plasma Physics, Nagoya University, Japan, 1983).

NOTE: This calculator provides a rough indication of the sputter yield; the accuracy is much lower than that of a TRIM/SRIM simulation. Data for target materials Zn, Cd and Pb have a lower accuracy than the others. In addition, modifications of the target composition will lead to low accuracy; notably in case of reactive projectiles.

Copyright © by Michael Schmid, IAP/TU Wien Surface Physics Group 2013–2024. No warranty for correctness of results.