Micro- and nano-electronics are amongst the key technologies in information and communication technologies (ICT), which are currently amongst the most important fields of innovation. Micro- and nano-electronics research focuses on the development of new process technologies and the redevelopment and enhancement of modern components, forming the basis for micro- and nano-electronics, sensor technology and bioelectronics.

The Center for Micro and Nanostructures (ZMNS) is the technological pillar for this research work, providing state-of-the-art semiconductor technology, which must be continuously enhanced to enable research work in the run-up to the latest developments and to maintain the research focus as an attractive national and international cooperation partner. The independent provision of new materials, components and innovative nanoelectronic, optoelectronic and sensor components, as well as a sophisticated characterisation, are the key requirements for this.

Another pillar of this research focus is a highly efficient process and component simulation on which model development and optimisation are based. Accompanied by the technological-scientific foundation, this focus also involves research into new processes, components and aspects of circuitry that arise from the interaction of these technologies.

A further pillar is present in the form of circuit technology in analogue and digital circuits in nanometre CMOS with the combination of silicon technology and optoelectronics, where the focus areas lie in the domain of ultrafast analogue-digital and digital-analogue converters and innovative operational amplifier concepts in BICMOS technologies.

There is also the field of sensors and actuators, which is developing innovative micro-structured sensor and actuation concepts, implementing them autonomously in micro- and nanotechnology and developing new mechanical, electrical and thermal fields of application. The bioelectronics field focuses on the recording of bioelectrical processes in cells and attempts to use microelectronic technologies for the direct local recording of cell characteristics in living cells.