FEI Quanta 250 FEG with in-situ AFM

FEG SEM Quanta 250 with AFM
Equipment

Emitter: Schottky-FEG
Operation voltage: 0.2 - 30 kV
Beam current: > 100 nA

  • ETD Secundary electron detector
  • GIS detector (für ESEM)
  • retractable STEM detector
  • NavCam
  • Beam Decelaration
  • EDX: EDAX-AMETEK Octane Elite 55
  • OIM: EDAX Hikari CCD EBSD mit Forward Scatter Detektor
  • Picoindenter: Hysterion
  • in-situ AFM: GeTec AFSEM low noise, self sensing
Spezifications
  • Resolution: 1.2 nm (30 kV, high-vacuum)
  • Resolution: 1.5 nm (30 kV, low-vacuum/ESEM)
  • Resolution: 3 nm (1 kV, high-vacuum)
  • Resolution: 3 nm (3 kV, low-vacuum/ESEM)
Applications
  • High-resolution scanning electron microscopic examination
  • Chemical X-ray microanalysis
  • Structural investigations with EBSD
  • Investigation of non-conductive samples in the low vacuum range
  • Investigation of moist samples at pressures up to 4000 Pa
  • In-situ observation using AFM from GeTEC (AFSEM)
Extras
  • correlative microscopy using AFM from GeTEC (AFSEM)

person of responsibility

[Translate to English:] Portrait von Andreas Steiger-Thirsfeld