Emitter: Schottky-FEG
Betriebsspannung: 0.2 - 30 kV
Strahlstrom: > 100 nA

ETD SED
in-lens BSE detector
GIS detector (for ESEM)
retractable STEM detector
NavCam
Beam Decelaration

EDX: EDAX-Ametec Octane Elite 55
OIM: Hikari CCD EBSD with Forward Scatter Detektor
Picoindenter: Hysterion
AFM: GeTec AFSEM low noise, self sensing

resolution: 1.2 nm (30 kV, Hochvakuum)
resolution: 1.5 nm (30 kV, Niedervakuum/ESEM)
resolution: 3 nm (1 kV, Hochvakuum)
resolution: 3 nm (3 kV, Niedervakuum/ESEM)

high-resolution imaging
chemical X-ray analysis
structural investigations employing EBSD
investigations of insulating specimens in low-vacuum conditions
investigations of wet specimens at pressures up to 4000 Pa
in-sito imaging by employing AFM from GeTEC (AFSEM, opens an external URL in a new window)

correlativ microscopy by means of AFM from GeTEC (AFSEM, opens an external URL in a new window)