Ultrahigh vacuum (UHV) technology is the foundation for many experiments and applications in surface and solid-state physics, thin-film technology, and nanotechnology. Anyone working in the UHV field needs not only the right equipment, but above all a solid understanding of the underlying physical processes – and the ability to make the right decisions independently when problems arise.

The lecture first introduces the basic concepts of kinetic gas theory and vacuum technology. Building on an understanding of adsorption, diffusion, permeation, and vapor pressure curves, we develop a sense of which materials are suitable for use in UHV chambers. The generation and measurement of vacuum in the molecular flow regime is then treated in detail, in particular the properties of turbomolecular pumps, ion getter pumps, and cryopumps. The lecture units are accompanied by short calculation examples that provide hands-on practice in designing UHV systems as well as in making material and design choices for UHV applications. In addition, on one day there are practical exercises on a small vacuum system, so that students learn to identify and solve the problems that arise during practical work in a targeted manner.

Upon successful completion of the course, students are able to confidently apply the basic concepts of vacuum technology, design UHV systems appropriately, and make material selections and design decisions for UHV applications with precision.

The lecture is in English and generally held in a block format over 5–6 Fridays during the first weeks of each semester. Examinations are conducted orally, and appointments are arranged on request by email with Anna Niggas or e-mail with with Richard Wilhelm.